(1) Field service
- Trouble shooting
- Parts repair (HV controller, Stage/EVAC controller...)
- Tool modification (Inch modification)
- PM

(2) Refurbishment
- Consumable parts replace & Over-haul
- Adjustment & Calibration (Tool to tool matching)

(3) Tool installation & Relocation

(4) Application service
- Maintenance training
- Auto recipe crea create support
- Network connection

(5) Parts processing
- Wafer holder & Station holder
- Transfer robot Ceramic arm
- Lifting tool
- Shipping kit

Wafer size : S-8820, S-8840 (8inch or 6inch) / S-8620, S-8640 (6inch or 5inch)
Resolution: 5nm
Magnification : x 1000 to x 150,000 (SEM Image)
Throughput: 26 wafers / hour
CD measurement range: 0.1 to 10um
Reproducibility: ± 1% or 0.005um (3 sigma)

(1) 8inch→ 4 inch LTO3 Wafer Modification (S8820 WISOL, KOREA)
- 4inch Automatic loading system
- Auto recipe application