TECHNICAL SERVICE FOR S-88XX
작성자 정보
- admin 작성
- 작성일
컨텐츠 정보
- 144 조회
- 목록
본문
휴대폰메일sales@sndinfo.com
TECHNICAL SERVICE FOR S-88XX
■ Technical service items
(1) Field service
- Trouble shooting
- Parts repair (HV controller, Stage/EVAC controller...)
- Tool modification (Inch modification)
- PM
(2) Refurbishment
- Consumable parts replace & Over-haul
- Adjustment & Calibration (Tool to tool matching)
(3) Tool installation & Relocation
(4) Application service
- Maintenance training
- Auto recipe crea create support
- Network connection
(5) Parts processing
- Wafer holder & Station holder
- Transfer robot Ceramic arm
- Lifting tool
- Shipping kit
- Trouble shooting
- Parts repair (HV controller, Stage/EVAC controller...)
- Tool modification (Inch modification)
- PM
(2) Refurbishment
- Consumable parts replace & Over-haul
- Adjustment & Calibration (Tool to tool matching)
(3) Tool installation & Relocation
(4) Application service
- Maintenance training
- Auto recipe crea create support
- Network connection
(5) Parts processing
- Wafer holder & Station holder
- Transfer robot Ceramic arm
- Lifting tool
- Shipping kit
■ Specification
Wafer size : S-8820, S-8840 (8inch or 6inch) / S-8620, S-8640 (6inch or 5inch)
Resolution: 5nm
Magnification : x 1000 to x 150,000 (SEM Image)
Throughput: 26 wafers / hour
CD measurement range: 0.1 to 10um
Reproducibility: ± 1% or 0.005um (3 sigma)
Resolution: 5nm
Magnification : x 1000 to x 150,000 (SEM Image)
Throughput: 26 wafers / hour
CD measurement range: 0.1 to 10um
Reproducibility: ± 1% or 0.005um (3 sigma)
■ Performance
(1) 8inch→ 4 inch LTO3 Wafer Modification (S8820 WISOL, KOREA)
- 4inch Automatic loading system
- Auto recipe application
- 4inch Automatic loading system
- Auto recipe application
관련자료
댓글 0
등록된 댓글이 없습니다.